International Standardization of Micro Mechanical Sensors

Abstract

With development of silicon micro-machining technology, R&D and commercialization of micro mechanical sensors progressed. International standardization is indispensable to production, sale, and international trade. The organization and the deliberation method of IEC international standardization were described. As for a semiconductor pressure sensor, an international standard was published in 2001, and a semiconductor accelerometer is under deliberation internationally now. In addition to these, the micromachine terminology was proposed to IEC recently.