Journal of The Society of Instrument and Control Engineers
Online ISSN : 1883-8170
Print ISSN : 0453-4662
ISSN-L : 0453-4662
Technology Report
Development of Ultra-Low Power MEMS Gas Sensor
Tokuya SUZUKI, Tokumi NAGASE, Makoto OKAMURA, Naoyoshi MURATA, Toshitaka FURUTA, Hisao OHNISHI, Atsushi NONAKA, Takashi NAKAJIMA, Katsuki HIGAKI, Toshiro NAKAYAMA
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Keywords: MEMS, gas sensor, SnO2, thin film
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2018 Volume 57 Issue 4 Pages 287-290

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