Journal of The Society of Instrument and Control Engineers
Online ISSN : 1883-8170
Print ISSN : 0453-4662
ISSN-L : 0453-4662
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Fluorescence Based Nano-In-Process Measurement in Mechanical Machining
Masaki MICHIHATA
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Keywords: In-process measurement, Fluorescence, Surface metrology, In-situ calibration, Indentation
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2025 Volume 64 Issue 6 Pages 367-373

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