Journal of The Society of Instrument and Control Engineers
Online ISSN : 1883-8170
Print ISSN : 0453-4662
ISSN-L : 0453-4662
Nanometer Technology for Measurement of Micro-Shapes
Koji TOYODA, Yoshihisa TANIMURA
Author information
Keywords: noncontact measurement, micropattern, electron beam, linewidth measurement, nano-metrology
JOURNAL FREE ACCESS

1986 Volume 25 Issue 5 Pages 417-420

Details
Download PDF (575K)
Download citation RIS

(compatible with EndNote, Reference Manager, ProCite, RefWorks)

BIB TEX

(compatible with BibDesk, LaTeX)

Text
How to download citation
Contact us
Article 1st page
Content from these authors
© The Society of Instrument and Control Engineers
Previous article Next article
Favorites & Alerts

Recently viewed articles
Predecessor

Journal of the Instrument Technology, Japan

Automatic Control

Share this page
feedback
 Top