Journal of The Society of Instrument and Control Engineers
Online ISSN : 1883-8170
Print ISSN : 0453-4662
ISSN-L : 0453-4662
Application of Scanning Probe Microscope for Nano-Meter Fabrication Tool
Takahito ONO, Masayoshi ESASHI
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Keywords: micromachining, scanning probe microscopy, nanofabrication, pattern transfer, near field light lithography
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1999 Volume 38 Issue 12 Pages 763-768

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