Journal of The Society of Instrument and Control Engineers
Online ISSN : 1883-8170
Print ISSN : 0453-4662
ISSN-L : 0453-4662
Three-Dimentional Ultra Precision Measurements of Forms and Surface Features
Kazuyuki SASAJIMA
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Keywords: form, surface roughness, three dimension, measurement, ultra precision
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2002 Volume 41 Issue 11 Pages 807-810

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