Journal of The Society of Instrument and Control Engineers
Online ISSN : 1883-8170
Print ISSN : 0453-4662
ISSN-L : 0453-4662
Nano-Scale Analytical and Evaluation Techniques Essential to the Development of ULSI
Osamu UEDA
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Keywords: nano-scale analysis, ULSI, thin film, convergent beam electron diffraction, electron holography, scanning probe microscopy
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2006 Volume 45 Issue 2 Pages 125-130

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