CO2/H2O Gas Sensor with a MEMS Fabry-Perot Filter

Makoto Noro; Kentaro Suzuki; Naoki Kishi; Hitoshi Hara; Tetsuya Watanabe; Hideto Iwaoka

doi:10.11499/sicep.2002.0.308.0

SICE Annual Conference 2002

DOI https://doi.org/10.11499/sicep.2002.0.308.0

Conference information

Host: The Society of Instrument and Control Engineers

Co-host: IEEE/Industiral Electronic Society, IEEE/Robotics and Automation Society, IEEE/Control System Society

CO2/H2O Gas Sensor with a MEMS Fabry-Perot Filter

Makoto Noro, Kentaro Suzuki, Naoki Kishi, Hitoshi Hara, Tetsuya Watanabe, Hideto Iwaoka

Author information

Keywords: Fabry-Perot Filter, NDIR, gas sensor

CONFERENCE PROCEEDINGS FREE ACCESS

Pages 308

Details

Abstract

An electrostatically driven tunable MEMS Fabry-Perot Filter with wide wavelength range from 2.5μm to 4.5μm has been developed for NDIR CO₂/H₂O gas sensors. The Fabry-Perot Filter is equipped with the NDIR system, and the principle of this gas sensing method has been confirmed.

Corresponding author

Register with J-STAGE for free!