Detection of humidity by Quartz Crystal Microbalance method using thin metal base

Hiroki Ito; Seiichi Kakuma; Ryoji Ohba; Kazutoshi Noda

doi:10.11499/sicep.2004.0_114_2

SICE Annual Conference 2004

DOI https://doi.org/10.11499/sicep.2004.0_114_2

Conference information

Host: The Society of Instrument and Control Engineers

Co-host: The IEEE Industrial Electronics Society, The IEEE Robotics and Automation Society, The IEEE Control Systems Society, The IEEE Systems, Man and Cybernetics Society, The Instrumentation, Systems, and Automation Society

Detection of humidity by Quartz Crystal Microbalance method using thin metal base

*Hiroki Ito, Seiichi Kakuma, Ryoji Ohba, Kazutoshi Noda

Author information

Keywords: Quartz Crystal Microbalance, Humidity sensor

CONFERENCE PROCEEDINGS FREE ACCESS

Pages 114

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Abstract

The sensitive humidity sensor by Quartz Crystal Microbalance (QCM) using thin metal base is presented. A humidity change is detected by an oscillation frequency change depending on the mass of the absorbed moisture. We conclude that platinum base is suitable material for a practical humidity sensor.

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