Abstract
Recently the demand for evaluating high moisture barrier materials is increasing in the field of electronic industry. In this paper, a rapid and high sensitive measurement method of water vapor transmission rate using atmospheric pressure ionization mass spectrometry (APIMS) was investigated. WVTR measurement using APIMS provides simpler and more rapid evaluation for high moisture materials compared to the conventional methods. The results suggested that APIMS has potential to determine WVTR of films down to 0.002 g/(m ・d).
