Innovative electron microscope for light-element atom visualization

- Development of low-voltage electron microscopes in “Triple-C” project -

Abstract

In order to meet the demand for techniques to directly visualize atomic-level structures of nano-materials and so-called soft matter (organic molecules, bio-materials, etc.), development of innovative electron microscopes are indispensable. These innovative microscopes are totally different from conventional transmission electron microscope (TEM) and scanning TEM (STEM) with ultra high acceleration voltage mainly pursuing high resolution. We recognized the usefulness of low acceleration voltage very early, and have started the development of totally new electron microscopes specified for observation of light-element materials. We aim to realize simultaneously significant decrease of acceleration voltage and increase of performance which cannot be attained with conventional apparatuses. Here we report the aims and results of our “Triple-C” project to develop low-voltage TEM/STEMs equipped with new Cs (spherical aberration) and Cc (chromatic aberration) correction systems for carbon (C)-based nano-materials, and present our view on future applications of electron microscopes with low acceleration voltage.