Preparation of superconducting films by metal organic deposition

— Research and development towards a fault current limiter and other electric devices —

Abstract

For the application of oxide superconductors to power-electric and microwave devices, it is necessary to form oxide superconductors into films and tapes. Since oxide superconductors are fragile and processing resistant, establishing a thin film processing technology for oxide superconductors is important. In this article, we describe our approach to developing such technology with an example that involves the processing of high quality large-size superconducting thin films by metal organic deposition (MOD) for the realization of a fault current limiter. MOD is a simple and low-cost processing technology for metal oxide thin films, which are prepared by dipping a substrate in a coating solution and firing the substrate.