2016 Volume 2016 Issue 275 Pages 191-198
For ultra-high sensitive sensing at room temperature, the resonance properties such as the resonant frequency and Q factor of a graphene mechanical resonator were improved by fluorine surface modification and applying a tensile stress. The surface of a membrane-type mono-layer graphene mechanical resonator with a size of 2 µm×2 µm was fluorinated using XeF2 gas, and the effect of the fluorine surface modification on its resonance was investigated. We found that the Q factor was increased by a factor of 7.7 after fluorination for 30 s. In addition, the fabrication of a double-clamped beam graphene resonator with a high Q factor was achieved by applying a tensile stress induced by the shrinkage of a SU-8 resist. A graphene resonator 10 µm long, 300 nm wide and consisting of 5 layers was fabricated. A superior Q factor of 7723 was achieved at room temperature in a vacuum of 10−3 Pa. These methods are expected to be key techniques in order to obtain an ultra-high sensitive sensing device based on a graphene mechanical resonator.
