ULSI and Carbon Product

Abstract

ULSI is the key component for information and telecommunication systems. Carbon products and SiC productsused for ULSI are reviewed in the field of crystal growth, oxidation, doping and thin film formation. For the advancedULSI fabricaton, requirements for the carbon and SiC products are made clear. Requirements are ultra-high purity, matching for Si wafers of large diameter, reduced absorbed gas, reduced particles and reduced reaction with Si wafers. Engineers in this industry and in semiconductor industry should be in cooperation with each other and make newbreakthroughs to solve these problems.