Abstract
Glass-like carbon material essentially has such excellent attributes as isotropicand non-contaminativeproperties, compared with other carbon materials. Though glass-like carbon material was only applied within arestricted field in the beginning of its developement, it has been used as a essential material for components in the silicon wafer treatment process in the manufacture of semiconductor devices, for example, LSI, and other apllications as fuel cells' components, electrochemical electrodes and so on due to its excellent poperties in resent years. In future, it will be in great demand in many fields through further improvements of its properties, for example, the improvement of oxidation resistance equivalent to some rival materials as silicon, silicon carbide and silicon dioxide, and the development of new apllications.
