TANSO
Online ISSN : 1884-5495
Print ISSN : 0371-5345
ISSN-L : 0371-5345
Carbon deposition into nanospace through CVD
Hirotomo NishiharaHironori OrikasaTakashi Kyotani
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2007 Volume 2007 Issue 230 Pages 345-351

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Abstract
It has been recognized that it is difficult to achieve uniform carbon depostion into nanospace such as micropores and mesopores by using CVD. However, we have recently demonstrated that, even in molecular-scale and labyrinthine pores like the nanochannels of zeolites, uniform carbon deposition is possible if CVD conditions are carefully selected and optimized. This review article introduces several examples of the carbon deposition into micro- and mesopores and shows key factors that impact the uniform deposition into such nanospace.
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© The Carbon Society of Japan
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