Chemical structural analysis of diamondlike carbon by X-ray photoelectron spectroscopy

Abstract

Diamondlike carbon (DLC) is an amorphous carbonaceous material composed of sp² carbon, sp³ carbon, and hydrogen.We have analyzed the chemical structure of DLC by using X-ray photoelectron spectroscopy (XPS). In this paper, we reviewed our DLC analysis. The C ls spectra of the DLC films were analyzed using the Doniach-Šunjic function convoluted with a Gaussian function. The spectra were decomposed into four components as follows: sp³ carbon with carbon-carbon bonds (C-C sp³ carbon, 283.8 eV), sp² carbon with carbon-carbon bonds (C-C sp² carbon, 284.3 eV), sp² carbon with hydrogen-carbon bonds (H-C sp² carbon, 284.8 eV), and sp³ carbon with hydrogen-carbon bonds (H-C sp³ carbon, 285.3 eV).