Abstract
Aiming for evaluating the translational temperature in an argon-oxygen mixed-gas inductively coupled plasma, laser absorption spectroscopy is applied. In order to consider the radial distribution, an Abel inversion, fitting method, is performed to the measured horizontal distributions. As a result, it is found that the radial translational temperature distribution is almost uniform. In addition, the translational temperature estimated by the absorption profile on the center axis is almost same with the averaged value within the test region obtained after Abel inversion. Axial translational temperature distributions are obtained in the surface temperature range from 300 to 1470 K at the total pressure of 11 Pa for silicon carbide on the center axis. Finally, using the measured translational temperatures, catalytic efficiencies of atomic oxygen recombination are evaluated with the results measured by actinometry.
