Abstract
Unification of relative sensitivity factors (RSFs) in Ar glow discharge mass spectrometry was investigated. A Mega flat cell was used as a discharge cell for disk samples; ultra-high purity Ar (99.9999%) was used as the discharge gas. A sample mask for the disk sample with an inner diameter of 12 mm (made by Ta: part of the anode) was used, and a donut-shaped alumina (Al2O3) piece with an inner diameter of 20 mm was used for insulation between the sample and the anode. Discharge parameters were set as 1 kV–3 mA. Reference materials, such as Al, Co, Ni, Ti, Cu, and Fe matrices, were measured; the RSF value of every element for each matrix was determined. Then the RSF values were recalculated using Fe as the internal standard element, and the possibility of unification was verified for each matrix. Results showed that the RSF values of elements analyzed for each matrix normalized by Fe agreed well for five kinds of matrices. The relative standard deviation (RSD (%)) of the average of those RSFs varied: from greater, 15% for W and 18% for Cu; to smaller, 6% for Si and 5% for Cr. Results therefore demonstrated that using the RSF value for Fe can enable quantitative analysis within 10% of relative error of materials and substances for which no reference material (group) is available. For example, Si and Si-based materials and substances can be analyzed by normalizing the RSF value of Si to 1, recalculating the RSF values of the element analyzed therewith, and using them for corrective quantitative analysis.
