Analysis of Alloy Electroplated Film by Glow Discharge Spectrometry

Abstract

Glow discharge spectrometry (GDS) was used to analyze Fe-Zn and Ni-Zn alloy films. In the analysis of the Fe-Zn alloy film, composition and coating weight of the alloy film were accurately determined from the relationship between the normalized Fe intensity ratio, I_Fe/(I_Fe+I_Zn), and Fe% and that between the sputtering rate, q_Fe-Zn, and Fe%. The region of low wattage discharge in the abnormal glow discharge, in which high depth resolution was obtained, was used for the experiments. This method was also applied to the analysis of Ni-Zn alloy film. In addition, depth-direction analysis of the Fe-Zn alloy film was investigated.