Tetsu-to-Hagane
Online ISSN : 1883-2954
Print ISSN : 0021-1575
ISSN-L : 0021-1575
Role of Vacuum in High-technologies
Katsuya NAKAYAMA
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Keywords: high technology, vacuum, pump, physical properties, plasma, gas flows, electronic device, nuclear physics
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1987 Volume 73 Issue 10 Pages 1303-1308

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