1991 Volume 77 Issue 11 Pages 1980-1984
Sputtered Neutral Mass Spectrometry (SNMS) employing nonresonant laser post-ionization has been studied for quantitative analysis of steel standard sample. SNMS technique can overcome weakpoint of the conventional SIMS, that is, low quantitativeness, by means of detecting sputtered neutrals.
Because the numbers of sputtered neutrals are proportional to the concentration of the surface of the sample. In this report, impurity elements in the steel sample were evaluated quantitatively down to ppm level. And metallic contaminant elements on the silicon surface were confirmed to be quantitatively determined down to 1011 atoms/cm2. And post-ionization efficiency was also estimated, resulting nearly 16%.
