Tetsu-to-Hagane
Online ISSN : 1883-2954
Print ISSN : 0021-1575
ISSN-L : 0021-1575
Variation of Textures of TiN Deposited on (011) [100] Single Crystal of Silicon Steel due to Difference in PVD Coating Method
Yukio INOKUTI
Author information
JOURNALS FREE ACCESS

1996 Volume 82 Issue 10 Pages 841-846

Details
Abstract

In order to clarify the difference in the textures of TiN film due to PVD coating methods, TiN ceramic coating by HCD (Hollow Cathode Discharge) and EB (Electron Beam)+RF (Radio Frequency) methods was done on the surface of polished silicon steel samples. Pole figures of dual textures of the TiN film and related silicon steel samples were measured simultaneously using SSD (Solid State Detector) auto pole figure apparatus.
(111)TiN pole figure of TiN film done by the HCD method showed the dominant texture of (111) [110] orientation, and (100) Si-steel pole figure of (011) [100] single crystal of silicon steel showed the dominant texture of (011) [100] orientation, in which two (220) TiN pole peaks of TiN film on TD axis were detected simultaneously, and their conjugated pole peaks manifested elliptical shape.
In contrast, (111)TiN pole figure of TiN film done by the EB+RF method showed the weak texture of (111) crystallographic plane, and (100) Si-steel of silicon steel sheet showed the dominant texture of (011) [100] orientation, in which (220)TiN pole peaks of TiN film were detected simultaneously, and their conjugated pole peaks also manifested elliptical shape.
It is considered that, due to the higher ionization by the HCD method than that by EB+RF, it was possible for TiN film to form the dominant texture of (111) [110] orientation, resulting in a fine and smooth TiN film with good adhesion, thereby endowing the TiN-coated silicon steel sheet with a reduced iron loss.

Information related to the author
© The Iron and Steel Institute of Japan
Previous article Next article
feedback
Top