Abstract
The Fe-43.8at%Pd, -60.3at%Pd and -66.9at%Pd alloy films were prepared by DC magnetron sputtering method. The structures of Fe-Pd alloy films were mainly fcc phase and partially fct phase. The compressive residual stresses were generated in films on film formation. In addition, the good correlation was obtained between compressive residual stress and coercive force of Fe-Pd alloy films. The Fe-60.3at%Pd alloy film has the largest compressive residual stress, the largest coercive force and largest magnetostriction. The magnetostrictive susceptibility largely depends on the magnetic susceptibility. These changes in the properties depend on the composition rate of Fe-Pd alloys.
