Abstract
We have developed the micro-fabricated cantilever with an MR sensor (MR cantilever) for scanning magnetoresistance microscope (SMRM). In order to improve the stability of the MR signal acquisition and the reproducibility of the system, we have proposed a new fabrication procedure for the SMRM cantilever. The MR cantilever with a high field sensitivity is realized and allows us to measure magnetic field quantitatively only for the relatively large external field. However, for the small field detection, superposition of topographic signals on the magnetic signals is not negligible. To avoid this problem, four-terminal SMRM cantilevers were fabricated. In addition, we accomplish to make the cantilever with a high spatial resolution by miniaturizing the MR element.
