Performance of an Electron Beam Recorder for Disk Mastering

Abstract

We have been developing an electron beam recorder (EBR) for high-density optical disk mastering, and use it for read-only memory (ROM) and rewritable (RW) substrate mastering. We confirmed a 4.4% jitter value at 25 GB ROM disk. The reproducing characteristics of the high-density optical disk were dominated by the signal-to-noise ratio and the cross-talk. We fabricated an RW substrate with a 320-nm track pitch and confirmed a 5.4% jitter value for a data bit length of 112 nm after 100 direct-over-write and crosswrite cycles.