Influence of Sputtering Conditions for Co/Pd Multilayer on its Magnetic Properties and Crystalline Microstructure

Abstract

The effects of substrate temperatures during deposition and N₂ gas addition to Ar sputtering gas on the magnetic properties and crystalline microstructure of Co/Pd multilayered films were investigated. The Co/Pd multilayered film deposited at a substrate temperature of 230°C with Ar containing N₂ of 0.06 mTorr exhibited weaker intergranular exchange coupling than that deposited at room temperature without N₂ addition. Plan-view TEM observation revealed that the crystal grains in the Co/Pd multilayered film, which was subjected to the heating process with N₂ additive gas, were physically isolated by vacant grain boundaries, resulting in the decrease in intergranular exchange coupling.