Abstract
High permeability of -500 up to the GHz frequency range was observed in a CoZrNb/Fe-C multilayer film deposited by using a facing-target sputtering apparatus at room temperature. It was found that the Fe-C layer played a key role in increasing the saturation magnetization and the anisotropy field of the multilayer film sufficiently to raise the ferromagnetic resonance frequency beyond 2.0GHz. The multilayer film was soft magnetic when the thickness of the Fe-C layer was 5-50 nm. The Fe-C layer exhibited a columnar growth feature, and the aspect ratio of the column increased with increasing the Fe-C layer thickness. Magnetic anisotropy perpendicular to the film plane appeared in multilayer films with Fe-C layer thicknesses of -80nm and above.
