Thin-Film Inductor Designs and Materials for High-Current Low-Voltage Power

Abstract

Thin-film inductors for dc-to-dc converters for microprocessor power delivery are discussed. Thin-film inductors offer small size and fast transient response as required by the application. The choice of magnetic material and design of the inductor are discussed. Composite granular metal-nonmetal films applied in a Vgroove stucture show strong promise for this application. The possibility of using magnetic films with stripe domains is also discussed.