A New 1 MHz-9 GHz Thin-Film Permeameter Using a Side-Open TEM Cell and a Planar Shielded-Loop Coil

Abstract

A new permeameter for both metallic and insulative thin-films is proposed for up to 9 GHz range. The film sample is driven by a traveling electromagnetic field and the output signal is sensed by a planar shielded-loop coil. The electric field induced voltage at the pickup coil can well be suppressed by the nature of the planar shielded-loop coil. Measurements on an amorphous CoNbZr thin film and a granular CoZrO thin film were demonstrated.