Transactions of the Magnetics Society of Japan
Online ISSN : 1884-6726
Print ISSN : 1346-7948
ISSN-L : 1346-7948
A New 1 MHz-9 GHz Thin-Film Permeameter Using a Side-Open TEM Cell and a Planar Shielded-Loop Coil
Masahiro YamaguchiYasunori MiyazawaKatsuji KaminishiKen-Ichi Arai
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2003 Volume 3 Issue 4 Pages 137-140


A new permeameter for both metallic and insulative thin-films is proposed for up to 9 GHz range. The film sample is driven by a traveling electromagnetic field and the output signal is sensed by a planar shielded-loop coil. The electric field induced voltage at the pickup coil can well be suppressed by the nature of the planar shielded-loop coil. Measurements on an amorphous CoNbZr thin film and a granular CoZrO thin film were demonstrated.

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