Large Area Fabrication of Co Particles by Ion-Beam-Induced Chemical Vapor Deposition (IBICVD)

Abstract

Co particles were fabricated by means of a focused ion beam (FIB) system with dicobalt octacarbonyl precursor. Precursor vapor was introduced into the specimen chamber and irradiated with a Ga⁺ ion beam having a diameter of several tens of nanometers through vector scan rastering. An attempt was made to confirm the effect of a single beam incidence on the Co dot size.