Fabrication and Characterization of an MR Cantilever with a Spin-Valve Sensor for a Scanning Magnetoresistance Microscope

Abstract

We developed a new micro-fabricated cantilever with a spin-valve sensor (MR cantilever) for a scanning magentoresistance microscope (SMRM). Since thespin-valve sensor has a self-biasing mechanism, it allowsthe SMRM to respond to an observed magnetic field linearly without any external bias magnetic field, and itmakes the SMRM more sensitive to magnetic fields. Wehave succeeded in introducing the self-biasing mechanism into the SMRM system by fabricating the spin-valve sensor on a cantilever.