Abstract
In this study, we examined the partial reduction of anatase TiO2, both without form transformation from anatase to rutile and without transformation to Ti2O3, using hydrogen plasma. In this experiment, RF discharge plasma (13.56 MHz) was used, and the plasma was generated by a discharge between electrodes attached on the outer surface of a quartz tube. The reduced TiO2 was analyzed by XRD. Consequently, it was shown that, under the proper conditions, hydrogen plasma can partially reduce anatase TiO2 at temperatures lower than 800°C, both without form transformation from anatase to rutile and without transformation to Ti2O3.
