Abstract
Micro-scale tools, such as punch tools, used in die-forming processes to fabricate micro-scale mechanical devices currently have a relatively short lifespan. The ion implantation method studied in the 1980s shows promise for improving the lifespan of micro punch tools. In this study, 150 micro m-diameter holes were punched in a 0.2-mm-thick stainless spring steel by using a punch tool. Ion implantation of the punch tool using silicon or gold species decreased the lifespan of the tool. However, the punch tool was then annealed at 700 K for 30 minutes after ion implantation, the silicon-ion implanted punch tool apparently restored its lifespan to that of an 'un-processed' punch tool (no ion-implantation or annealing). Moreover the gold-ion implanted punch tool had a lifespan 10 times longer than an un-processed punch. In conclusion, rearrangement of the disordered lattice caused by ion-implantation damage improves the toughness of micro punch tools.
