Transactions of the Materials Research Society of Japan
Online ISSN : 2188-1650
Print ISSN : 1382-3469
ISSN-L : 1382-3469
Multilayer Structure Analysis Using Angular Fluorescence Intensity Variation under Grazing Incidence Condition
Kouichi HayashiHisataka TakenakaNaohisa HappoShinya Hosokawa
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2008 Volume 33 Issue 3 Pages 561-565

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Abstract
Glancing-angular dependence of the fluorescence intensity from a layered sample typically shows Kiessing fringe similar to an X-ray reflectivity curve, and it can be explained by a concept of the X-ray holography, because X-rays directly reaching at a layer emitting fluorescence act as reference waves in holography, and X-rays singly reflected at interfaces act as object waves. In the present work, to prove the validity and availability of this idea, we designed a Pt/Si/Ti/ Ag/Si multilayer, whose top Pt layer was ultra-thin film and the holographic oscillations in angular dependence of the Pt La X-ray fluorescence intensity from Pt/Si/Ti/Ag/Si multilayer were evaluated theoretically and experimentally. In the theoretical study, depth positions at the three interfaces of Si/Ti, Ti/ Ag and Ag/Si were successfully reconstructed in the magnitudes of Fourier transforms of the oscillations in the angular dependence of the Pt La X-ray fluorescence intensity, whereas magnitudes of Fourier transforms from the X-rat reflectivity showed quite different tendency. In the experimental study, peaks corresponding to the interfaces of Ti/ Ag and Ag/Si appeared in the magnitude of the Fourier transform of the oscillation in the angular dependence of the Pt La X-ray fluorescence intensity.
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© 2008 The Materials Research Society of Japan
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