Abstract
Silica/polymethylmethacrylate (PMMA) hybrid thin films were successfully prepared on polybutyleneterephtalate (PBT) substrate by dip-coating using perhydropolysilazane (PHPS) as a silica source. The effect of thermal treatment on conversion from PHPS to Silica was investigated by SEM and FT-IR in detail. Ultraviolet radiation in conversion to silica of thin film was most effective compared with heating in electric furnace. Mechanical properties of silica and silica/PMMA hybrid thin films also were examined by vickers hardness and pencil scratch hardness.