Transactions of the Materials Research Society of Japan
Online ISSN : 2188-1650
Print ISSN : 1382-3469
ISSN-L : 1382-3469
The Effect of Thermal Treatment on Conversion to Silica of Silica / Polymethylmethacrylate Hybrid Films Prepared by Sol-Gel Method Using Perhydropolysilazane
Junko ShimomuraHajime HorikawaTakashi OgiharaKazumi KatoHisao SuzukiHiromitsu Kozuka
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2008 Volume 33 Issue 4 Pages 993-996

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Abstract
Silica/polymethylmethacrylate (PMMA) hybrid thin films were successfully prepared on polybutyleneterephtalate (PBT) substrate by dip-coating using perhydropolysilazane (PHPS) as a silica source. The effect of thermal treatment on conversion from PHPS to Silica was investigated by SEM and FT-IR in detail. Ultraviolet radiation in conversion to silica of thin film was most effective compared with heating in electric furnace. Mechanical properties of silica and silica/PMMA hybrid thin films also were examined by vickers hardness and pencil scratch hardness.
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© 2008 The Materials Research Society of Japan
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