Abstract
The paper addresses the vacuum performance of a carbon-doped titanium oxide film on a titanium material and applicability of the surface modification of vacuum flange to ultrahigh vacuum systems. The total amount of desorption gases of this material is almost the same as that of chemically-polished stainless steel with very low outgassing under non-vacuum baking conditions. Its total amount is half of that of stainless steel after the vacuum baking process. These results indicate that the carbon-doped titanium oxide film has very low outgassing properties. The surface modification was also applied to knife edge of a titanium vacuum-flange. The carbon-doped titanium oxide film exhibits sufficient durability so that after being tightened 40 times the knife edge was not worn out. It was found that Conflat flange made of this material can be utilized for practical vacuum systems.
