Preparation of Pt-deposited TiO₂ films and evaluation of photocatalytic properties

Abstract

This research was designed for planning a progress of photocatalytic properties of TiO₂ thin films prepared by RF magnetron sputtering method with depositing Pt particles on top. The films prepared without heating substrate showed anatase structure. The organic-decomposition properties of TiO₂ thin films with Pt deposition showed large decomposition rate compared with these without Pt deposition. But optically excited hydrophilicity characteristics were descreased in the case of Pt deposition