Fabrication of Concave and Convex Structure Array Consisted of Epoxy Long-Nanowires by Light and Heavy Ion Beams Lithography

Abstract

  New microprocessing method with a combination of Proton Beam Writing (PBW) and Single Particle Nanofabrication Technique (SPNT) was demonstrated to control a location and a shape on cohering epoxy nanowires. The feature of this method is to utilize a flame structure which is able to rectify the solvent flow at the development and drying. At first, flame array with a rectification for solvent flows were fabricated by the PBW using SU-8 photoresist films. And next, long nanowires with the length over 50 μm were obliquely formed on these flames by heavy beam with the energy of hundreds MeV. In the case of the overwriting on the passage-type flame, concave structures which consist of the nanowires were formed with matrix array. On the other hand, convex structures were formed among the each cavity-type flame. It was shown that the polymer nanowires were can be controlled the cohering shape and the fixing at designed locations by the flames to rectify the solvent flow.