Perpendicularly Oriented SiO₂ Nanopillar Array on SiO₂ Adhesive Layer

Abstract

Silica (SiO₂) nanopillar array was fabricated using microphase-separated block copolymer (PEO_m-b-PMA(Az)_n) thin film as a nano-template. Sol-gel precursor was selectively introduced into perpendicularly oriented poly(ethylene oxide) (PEO) nanocylindrical microdomains on a SiO₂ sol derived adhesive layer/Si wafer. The PEO cylindrical microdomains could give perpendicular orientation to the SiO₂ adhesive layer. The SiO₂ adhesive layer would support controlling the perpendicular orientation of SiO₂ nanopillar array due to increasing attachment area and forming Si-O-Si networks between SiO₂ nanopillar array and the SiO₂ adhesive layer during calcination process.