Abstract
TiO2 films were prepared by RF magnetron sputtering method. Cu and Fe films were loaded on the TiO2 films by ion coater to improve the photocatalytic properties. The organic-decomposition properties could be improved by the photocatalytic activity of these materials. An optimum thickness of each material was examined through this study. The highest photocatalytic properties for Cu and Fe loaded films were obtained at the thicknesses of 600 and 141 Å, respectively. In the case of hydrophilicity, the contact angles of the Cu and Fe–deposited films are 3 and 5 degrees, respectively after 1hour-UV irradiation. The organic-decomposition properties could be improved without deteriorating the hydrophilicity.
