Transactions of the Materials Research Society of Japan
Online ISSN : 2188-1650
Print ISSN : 1382-3469
ISSN-L : 1382-3469
Regular Papers
Piezoelectric Properties and Microstructure of BaTiO3 Films on Heat-Resistant Stainless-Steel Substrates Deposited Using Aerosol Deposition
Yoshihiro KawakamiMasato WatanabeKen-Ichi AraiSatoshi Sugimoto
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2016 Volume 41 Issue 3 Pages 279-283


Lead (Pb)-free piezoelectric films formed on metallic substrates are of interest for advanced piezoelectric devices. BaTiO3 films with a thickness of 10 μm were deposited on Fe-Cr-Al based heat-resistant stainless-steel substrates using aerosol deposition at room temperature. The BT film annealed at 1473 K for 1h had 1.2μm-diameter grains, of which crystal phase was the perovskite single phase of the tetragonal crystal system. The dielectric constant was 2200, and the dielectric loss was 0.02. Piezoelectric displacement of the cantilevers with annealed BT films on stainless-steel substrates improved with increased annealing temperature. The piezoelectric constant d31 of film annealed at 1473 K was -56 pm/V.

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© 2016 The Materials Research Society of Japan
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