2017 Volume 42 Issue 2 Pages 37-40
Zinc-containing diamond-like carbon films were prepared by a combination of magnetron sputtering of a zinc target and plasma source ion implantation and deposition in a hydrocarbon atmosphere. The effect of the preparation conditions on the film properties, such as surface morphology, film structure, Zn content, hardness and friction coefficient, was evaluated. A wide range of Zn contents can be realized, with films becoming rougher and softer with increasing Zn content. The films possess remarkable Zn-rich features as observed in SEM images. Depending on the Zn concentration, the features evolve from dots into more network-like structures.
