Color of TiN Film by RF Ion Plating

Abstract

RF ion plating is a dry coating process. We have investigated the relation between nitrogen gas flow rate and color of titanium nitride film by use of the RF ion plating method. We have also investigated the relation between pressure change during film deposition and color reproducibility of titanium nitride film by use of a quadrupole mass spectrometer. It was observed that color of titanium nitride changes from titanium color to gold and further to red brown gradually with the increase of nitrogen gas flow rate. Gas elements of deposited titanium nitride film was found to be nitrogen gas as reactive gas and hydrogen gas. Hydrogen gas produced by oxyhydrogen out of equipment decreased with the lapse of evaporation time. It is considered that oxigen element reacted to titanium vapor. Color of titanium nitride film is brighter for less hydrogen element and darker for more hydrogen element under the same condition.