Precise Control Method in Laser Drawing System for Patterning of Integrated-Optic Switching Circuits

Abstract

Precise patterning of optical waveguides is required in integrated-optic circuits such as acousto-optic matrix switches in order to reduce crosstalks and insertion losses. In this paper, an improvement of photomask patterning is discussed in laser drawing system with stepping motors. Mechanical fluctuation and vibration in xy-stages are experimentally clarified. A PID feedback control of the stages improved the patterning accuracy within ±40nm, which is limited by the resolution of deviation measurement. Also, W discuss methods for realizing an accuracy of ±5nm.