Abstract
We analyzed the vibration mode of an antenna structure MEMS showing quantized displacement using beam theory. As a result of our calculation of vibration mode of the resonator, the vibration mode increased step by step from the 1^<st> to the 10^<th> mode and then repeated again from the 1^<st> to higher mode. Number 10 of the 10^<th> mode is the half number of twenty elements on both side of the beam and under. The mechanical energy of the antenna structure MEMS could be expressed in the form of a one dimensional harmonic oscillator equation. From these calculations, we could explain why the quantized displacement occurred for the 1^<st> mode of the resonator.
