Proceedings of Symposium on Ultrasonic Electronics
Online ISSN : 2433-1910
Print ISSN : 1348-8236
1-05P-26 Realization of High Sensitivity of Frequency-Change-Type Single-Crystal Silicon Two-Axis Acceleration Sensor(Poster session 1)
Sumio Sugawara, Junpei Koike
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2007 Volume 28 Pages 67-68

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© 2007 Institute for Ultrasonic Elecronics
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