Proceedings of Symposium on Ultrasonic Electronics
Online ISSN : 2433-1910
Print ISSN : 1348-8236
1-05P-35 Fabrication of piezoelectric micromachined ultrasonic transducer array using epitaxial PZT thin film(Poster session 1)
Mikinori Ito, Mikito Otonari, Daisuke Akai, Kazuaki Sawada, Makoto Ishida, Nagaya Okada, Kazuki Higuchi
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2007 Volume 28 Pages 85-86

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© 2007 Institute for Ultrasonic Elecronics
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