Proceedings of Symposium on Ultrasonic Electronics
Online ISSN : 2433-1910
Print ISSN : 1348-8236
1P4-9 Pure-shear mode BAW resonator consisting of (112^^-0) textured AlN films(Poster Session)
Takahiko Yanagitani, Masato Kiuchi
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2008 Volume 29 Pages 111-112

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© 2008 Institute for Ultrasonic Elecronics
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